1200C CVD Tube Furnace
1200C CVD Tube Furnace
  • 1200℃
  • 1100℃
  • 300mm
  • φ60mm
  • Alloy Resitance Wires
  • 3-Channel
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Product Overview
 Chemical Vapor Deposition(CVD) Tube Furnace feature a chamber whith high quality alumina fiber insulation and high quality vacuum formed insulation resistance wire heating element,which  ensures fast heat up,excellent temperature control and short cool down times;
The CVD gas path system can be selected from one or three-way gas mass flow meters,and the gas mixing system can also be single-input and single-out.Accurate control of gas digital conrol,flow switch and flow time can be automatically controlled by touch screem to achieve unattended air control,accuracy:±1%F.S, response time:≤4sec;The vacuum system adopts a vacuum pump.

The vacuum measurement usee a digital composite vacuum machine or a pirani vacuum gauge.
The measuring instrument is integrated on the temperature control panel for easy operation.
Furnace operation is controlled by Shimaden(japan)32-segment digital controller with built-in RS485 digital communications port and USB adaptor,allowing the user to connect to a PC for remote control and monitoring of the furnace
You Can also save or export test results,All our furnaces are CE compliant.


1.Standard package includes set of stainless steel vacuum sealing flanges with valves and pressure meter.
2.Dual flanges support ensures better sealing and longer tube life.

3.Microprocessor based self-tuning PID control provides optimum thermal process with minimal overshoot.

4.Multiple atmosphere processes in a single cycle are possible (ex: binder burn out in air and parts sintering under rough vacuum or inert gas environment.)

5.Built-in ammeter and dual voltmeters for easy monitoring and troubleshooting.

6.Built-in computer interface.

7.Long life type S thermocouple.



1.Overheat protection shuts down the furnace if temperature is outside of acceptable range (refer to controller's manual) or when the thermocouple is broken or malfunctions. 2.Power failure protection resumes furnace operation right after the point of failure when power is reestablished.
 1200°C CVD tube furnace mainly provides high temperature heat treatment environment for industrial, research institutes, factories and other industrial laboratories, and is applied to new materials such as metal materials, ceramic materials, nano materials, and semiconductor materials.
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