Chemical Vapor Deposition(CVD) Tube Furnace feature a chamber whith high quality alumina fiber insulation and high quality vacuum formed insulation resistance wire heating element,which ensures fast heat up,excellent temperature control and short cool down times;
The CVD gas path system can be selected from one or three-way gas mass flow meters,and the gas mixing system can also be single-input and single-out.Accurate control of gas digital conrol,flow switch and flow time can be automatically controlled by touch screem to achieve unattended air control,accuracy:±1%F.S, response time:≤4sec;The vacuum system adopts a vacuum pump.
The vacuum measurement usee a digital composite vacuum machine or a pirani vacuum gauge.
The measuring instrument is integrated on the temperature control panel for easy operation.
Furnace operation is controlled by Shimaden(japan)32-segment digital controller with built-in RS485 digital communications port and USB adaptor,allowing the user to connect to a PC for remote control and monitoring of the furnace
You Can also save or export test results,All our furnaces are CE compliant.
1200°C CVD tube furnace mainly provides high temperature heat treatment environment for industrial, research institutes, factories and other industrial laboratories, and is applied to new materials such as metal materials, ceramic materials, nano materials, and semiconductor materials.