Features
The multi-heating zone tube furnace is composed of heating system, temperature control system, working tube and sealing kit. It can work under vacuum or atmosphere condition to meet various CVD process requirements. Multiple heating zones can help to achieve high uniformity temperature field conditions, and can also be applied to material temperature field gradient experiments. This product is widely used in sintering and heat treatment of graphene materials, lithium battery positive and negative electrode materials, semiconductor materials, new energy and new material industries.
Furnace shell
- The shell is made of metal Q235 low-carbon steel, and the surface is electrostatically resistant and resistant to corrosion.
- The solid double-layer metal frame is combined with the heat-insulating fan structure, and the furnace surface temperature is low
- Horizontal use mode, upper opening structure, easy to operate
Refractory material
Multi-layer insulation design, composed of lightweight alumina ceramic fiber and high-quality insulation board backing, does not contain asbestos components, low heat loss and low energy consumption
Heating system
- High-quality metal and ceramic heating element, free heat radiation heating in the furnace cavity, energy saving and high efficiency, long service life
- The heating element is heated in a ring or on two sides, so as to achieve good uniformity in the furnace
- Three heating zone, single temperature zone can control temperature independently, better temperature uniformity
Temperature Control Panel
- PID with SSR/SCR control mode, precise temperature control
- International standard thermocouple, long service life
- Equipped with heating indicator light and over-temperature alarm buzzer
Program Controller
- Advanced controllers that meet complex process requirements
- Simple and direct operation, flexible programming
- Programmable 30 program segments
- Over temperature and fault alarm, automatic safety protection
Vacuum Atmosphere Function
- With 304 stainless steel sealing flange to obtain vacuum or atmosphere in the furnace tube
- High-quality quartz glass working tube, or metal or alumina working tube can be selected to adapt to different working conditions